Refractometer

Semicon Refractometer PR-33-S

for semiconductor liquid chemical processes

A compact refractometer with an ultra pure modified PTFE flow cell body for semiconductor liquid chemical processes. Connected to the process by a ¼ — 1 inch pillar or flare fitting.

Vaisala K-PATENTS® Semicon Refractometer PR-33-S monitors the fab chemicals' concentration in cleanroom environment and in the integrated process tools (blending, clean, etch, and CMP).

The Vaisala Indigo500 series transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. Optional cloud connectivity from the Indigo500 through Jade Smart Cloud enables remote monitoring capabilities. 

The Indigo500 series includes the Indigo520 and Indigo510 transmitters. Transmitters can include touchscreen displays made of chemically strengthened (IK08) glass, ideal for local data visualization. Non-display transmitters also available. The transmitters extend the options for measurement probe connectivity, supply voltage, and wiring. Rugged IP66- and NEMA4-rated metal enclosures ensure reliable performance even in the harshest conditions.